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Slow Pull and Infrared Dryer

Slow Pull and Infrared Dryer is a hot water slow pull drying devi-ce designed specifically for the semiconductor industry, primari-ly used for wafer cleaning and drying processes. The equipment includes a hot water rinsing tank, a quartz infrared lamp tube + nitrogen drying tank,and a lifting mechanism,compatible with 4, 6, 8, and 12-inch wafers. Through the combination of hot water rinsing, infrared heating, and nitrogen drying, it ensures conta-mination-free and damage-free drying of wafers, meeting high cleanliness standards. The device supports full automation inte-gration and can be seamlessly embedded into fully automated production lines, enhancing production efficiency and process stability.

产品详情

ModelCGB-LD150CGB-LD200CGB-LD300
Wafer Specification6inch8inch12inch
Wafer Thickness

350-1400μm

Processing Time≤10min
Rotation SpeedPVDF、Quartz
Temperature60~80℃±2℃
HeaterImported high purity quartz
Temperature ManagementTemperature sensor; platinum RTD
Post-Processing Liquid ResidueNo

Safely Certification

SEMI S2