Slow Pull and Infrared Dryer is a hot water slow pull drying devi-ce designed specifically for the semiconductor industry, primari-ly used for wafer cleaning and drying processes. The equipment includes a hot water rinsing tank, a quartz infrared lamp tube + nitrogen drying tank,and a lifting mechanism,compatible with 4, 6, 8, and 12-inch wafers. Through the combination of hot water rinsing, infrared heating, and nitrogen drying, it ensures conta-mination-free and damage-free drying of wafers, meeting high cleanliness standards. The device supports full automation inte-gration and can be seamlessly embedded into fully automated production lines, enhancing production efficiency and process stability.
Model | CGB-LD150 | CGB-LD200 | CGB-LD300 | |
Wafer Specification | 6inch | 8inch | 12inch | |
Wafer Thickness | 350-1400μm | |||
Processing Time | ≤10min | |||
Rotation Speed | PVDF、Quartz | |||
Temperature | 60~80℃±2℃ | |||
Heater | Imported high purity quartz | |||
Temperature Management | Temperature sensor; platinum RTD | |||
Post-Processing Liquid Residue | No | |||
Safely Certification | SEMI S2 |