✨ Protecting the environment: Exhaust gases produced in semiconductor production contain a variety of har-mful substances, such as acid gases (HCl, HF) , alkaline gases (NH₃) , organic waste gases (IPA, acetone) , reactive gases (NF₃, SF₆) , heavy metal gases (PH₃, AsH₃) , and greenhouse gases (CF₄) . Tail gas treatment equipment can convert these harmful substances into harmless or low-harm substances , prevent them from being discharged into the atmosphere, reduce pollution to air, water and soil, and protect the ecological balance.

✨ Protecting the health of employees: It can reduce the concentration of harmful gases in the workshop, crea-te a safe and healthy working environment for employees, reduce the damage of harmful substances to employ-ees' respiratory system and nervous system, and reduce the risk of occupational diseases.

✨ Compliance with regulatory requirements: Countries have strict environmental requirements for the semic-onductor industry, and companies must dispose of exhaust gases to meet environmental regulations and standa-rds to avoid penalties for non-compliance and ensure that production activities are legal and compliant.

✨ Protecting equipment and facilities: Corrosive components in exhaust gases can corrode production equip-ment, ventilation ducts, etc., shorten their service life and increase maintenance costs. Treating off-gases can red-uce this corrosion and extend the life of equipment and facilities.