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Auxiliary Eqpt.

Quartz Bell Jar Cleaning Machine

Quartz Bell Jar Cleaning Machine is a type of equipment speci-fically used to clean quartz bell jars,which is commonly used in semiconductor manufacturing processes to ensure high cleanl-iness.

产品详情

✨ Excellent cleaning effect: all-round cleaning without dead angles, and the special cleaning process and no-zzle design are used to make the cleaning liquid is evenly sprayed to all parts of the inside of the quartz bell jar.

✨ High-precision cleaning: High precision can be achieved for the microscopic particles and impurities that may be generated during epitaxial growth cleaning.

✨ Avoiding stress damage: There will be no excessive mechanical or thermal stress on the quartz bell during the cleaning process, preventing cracked or deformed bell jars due to stress concentrations.

✨ High degree of automation: intelligent operation process, equipped with advanced automatic controlling system, fully-auto cleaning process.

✨ Strong compatibility and versatility:different sizes are compatible,and epitaxial stones can be designed to adapt to different sizes and specifications of bell jar cleaning to meet a variety of production needs.

✨ Customized cleaning process: the cleaning scheme can be flexibly customized according to different clea-ning needs and process requirements.


Tank Material     PVDF/NPP
Applicable Size     50/100/200/300/400/600mm
Handing Method     Special Tooling
Bearing Method     Manual/Robot
Slot Arrangement     Front and rear double slots/left and right multiple slots
Drying Method     N2 purge