Quartz Bell Jar Cleaning Machine is a type of equipment speci-fically used to clean quartz bell jars,which is commonly used in semiconductor manufacturing processes to ensure high cleanl-iness.
✨ Excellent cleaning effect: all-round cleaning without dead angles, and the special cleaning process and no-zzle design are used to make the cleaning liquid is evenly sprayed to all parts of the inside of the quartz bell jar.
✨ High-precision cleaning: High precision can be achieved for the microscopic particles and impurities that may be generated during epitaxial growth cleaning.
✨ Avoiding stress damage: There will be no excessive mechanical or thermal stress on the quartz bell during the cleaning process, preventing cracked or deformed bell jars due to stress concentrations.
✨ High degree of automation: intelligent operation process, equipped with advanced automatic controlling system, fully-auto cleaning process.
✨ Strong compatibility and versatility:different sizes are compatible,and epitaxial stones can be designed to adapt to different sizes and specifications of bell jar cleaning to meet a variety of production needs.
✨ Customized cleaning process: the cleaning scheme can be flexibly customized according to different clea-ning needs and process requirements.
Tank Material | PVDF/NPP |
Applicable Size | 50/100/200/300/400/600mm |
Handing Method | Special Tooling |
Bearing Method | Manual/Robot |
Slot Arrangement | Front and rear double slots/left and right multiple slots |
Drying Method | N2 purge |