✨ Acid Tank Etching: Utilizing chemical solutions in conjunction with a circulation and filtration system to per-form micro-etching on the surface of quartz rings.

✨ Chemical Liquid Recovery and Reuse: After the process is completed, the chemical liquid passes through a filter into a storage tank for reuse in subsequent cycles.

✨ Water Tank Cleaning: Equipped with multiple functions including rapid water filling(filling the tank within 1 minute ) , slow overflow ( removing contaminants from the tank at a rate of 2-10 L/min), high-pressure spraying (adjustable pressure from 0.3-1.2 MPa), bottom nitrogen bubbling (adjustable flow rate from 10-100 L/min), and rapid drainage(emptying the tank within 10 seconds),meeting the process requirements for different workpieces.

✨ Water-saving Function: After slow overflow and spraying, the DIW can be directed through a recycling pip-eline into a pure water tank for reuse in subsequent water filling, significantly saving DIW.

✨ Drying Function: Utilizing high-temperature N2 airflow combined with in-tank infrared heating tubes for dr-ying.